Pro-CMUT

MEMS Ultrasonic Proximity SONAR
Ultrasonic transducers allow non-contact detection of objects or persons like a binary presence sensor,
combined with object distance determination between few cm to some 10+ meters. Detected objects can
be solid, liquid or powder. One of the advantages of ultrasonic detection is the independence of object
color, shape or optical reflectivity. Nowadays, ultrasonic transducers are used to measure distance, level,
diameter, presence, position.
Current ultrasonic proximity sensors are based on piezoceramic elements that are subject to high power
consumption, temperature creep and fatigue. We offer MEMS ultrasonic transducers, either CMUT
(capacitive) or PMUT (piezoelectric) to replace piezoceramic elements. MEMS is a well-accepted technology
MEMS-based sensors are a crucial component in automotive electronics, medical equipment, hard disk
drives, computer peripherals, wireless devices and smart portable electronics such as cell phones and PDAs.
MEMS have already replaced piezoceramic elements in pressure sensors or accelerometers. Proposed use
of MEMS ultrasonic transducers are parking assistance systems and dead-angle monitoring, proximity
sensors for industry i.e. for industrial robotic systems, presence and movement detection in intelligent
buildings. The offer includes the packaging of the MEMS + integration with electronics onto PCB + software.
The distance detection is 0,5 m.